Authors: HANISH CK GRIZZLE JW

Citation: Ck. Hanish et Jw. Grizzle, AUTOMATED TUNING OF AN ELECTRON-CYCLOTRON-RESONANCE CAVITY TO A MICROWAVE-POWER SOURCE, Journal of vacuum science & technology. A. Vacuum, surfaces, and films, 15(5), 1997, pp. 2717-2727

Authors: HANISH CK GRIZZLE JW CHEN HH KAMLET LI THOMAS S TERRY FL PANG SW

Citation: Ck. Hanish et al., MODELING AND ALGORITHM DEVELOPMENT FOR AUTOMATED OPTICAL ENDPOINTING OF AN HBT EMITTER ETCH, Journal of electronic materials, 26(12), 1997, pp. 1401-1408

Authors: THOMAS S CHEN HH HANISH CK GRIZZLE JW PANG SW

Citation: S. Thomas et al., MINIMIZED RESPONSE-TIME OF OPTICAL-EMISSION AND MASS-SPECTROMETRIC SIGNALS FOR OPTIMIZED END-POINT DETECTION, Journal of vacuum science & technology. B, Microelectronics and nanometer structures processing, measurement and phenomena, 14(4), 1996, pp. 2531-2536

Authors: BENSON TE KAMLET LI RUEGSEGGER SM HANISH CK HANISH PD RASHAP BA KLIMECKY P FREUDENBERG JS GRIZZLE JW KHARGONEKAR PP TERRY FL BARNEY B

Citation: Te. Benson et al., SENSOR SYSTEMS FOR REAL-TIME FEEDBACK-CONTROL OF REACTIVE ION ETCHING, Journal of vacuum science & technology. B, Microelectronics and nanometer structures processing, measurement and phenomena, 14(1), 1996, pp. 483-488