Authors:
SEIDL A
TAKAI M
SAYAMA H
HARAMURA K
RYSSEL H
SCHORK R
KATO K
Citation: A. Seidl et al., RESIDUAL-STRESS DURING LOCAL SIMOX PROCESS - RAMAN MEASUREMENT AND SIMULATION, Nuclear instruments & methods in physics research. Section B, Beam interactions with materials and atoms, 80-1, 1993, pp. 842-845