Authors: HARING RA NUNES SL MCGOUEY RP GALLIGAN EA VOLKSEN W HEDRICK JL LABADIE J

Citation: Ra. Haring et al., ADHESION PROPERTIES OF A STRUCTURAL ETCH-STOP MATERIAL FOR USE IN MULTILAYER ELECTRONIC WIRING STRUCTURES, Journal of materials research, 10(4), 1995, pp. 1028-1037