Authors:
NAMAVAR F
KALKHORAN NM
CLAVERIE A
LILIENTALWEBER Z
WEBER ER
SEKULAMOISE PA
VERNON S
HAVEN V
Citation: F. Namavar et al., LATERAL AND VERTICAL ISOLATION BY ARSENIC IMPLANTATION INTO MOCVD-GROWN GAAS-LAYERS, Journal of electronic materials, 22(12), 1993, pp. 1409-1412