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HAWORTH L
LU J
HILL P
WESTWOOD DI
MACDONALD JE
HARTMANN N
SCHNEIDER A
ZAHN DRT
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HILL P
LU J
HAWORTH L
WESTWOOD DI
MACDONALD JE
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Authors:
HILL P
WESTWOOD DI
HAWORTH L
LU J
MACDONALD JE
Citation: P. Hill et al., NITRIDATION OF THE GAAS(001) SURFACE USING ATOMIC NITROGEN, Journal of vacuum science & technology. B, Microelectronics and nanometer structures processing, measurement and phenomena, 15(4), 1997, pp. 1133-1138
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