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Results: 1
INTEGRATED PHOTOCAPACITIVE POSITION-SENSITIVE DETECTOR MADE IN CMOS TECHNOLOGY
Authors:
SCHMIDT WD AHLERS H HELMIG V BOHRISCH R BOLDT J
Citation:
Wd. Schmidt et al., INTEGRATED PHOTOCAPACITIVE POSITION-SENSITIVE DETECTOR MADE IN CMOS TECHNOLOGY, Sensors and actuators. A, Physical, 39(2), 1993, pp. 117-124
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