Citation: Jy. Choe et al., LASER-INDUCED THERMAL-DESORPTION ANALYSIS OF THE SURFACE DURING GE ETCHING IN A CL-2 INDUCTIVELY-COUPLED PLASMA, Journal of vacuum science & technology. A. Vacuum, surfaces, and films, 16(6), 1998, pp. 3266-3273
Citation: Jy. Choe et al., ANALYSIS OF THE ETCHING OF SILICON IN AN INDUCTIVELY-COUPLED CHLORINEPLASMA USING LASER THERMAL-DESORPTION, Journal of vacuum science & technology. A. Vacuum, surfaces, and films, 15(6), 1997, pp. 3024-3031
Citation: R. Eryigit et al., USE OF SURFACE PHOTOABSORPTION TO ANALYZE THE OPTICAL-RESPONSE OF GAAS(001) SURFACES, Journal of vacuum science & technology. A. Vacuum, surfaces, and films, 15(1), 1997, pp. 138-144
Authors:
KIM S
CHANG GL
HERMAN IP
BEVK J
MOORE KL
HALL DG
Citation: S. Kim et al., ISOELECTRONIC BOUND-EXCITON PHOTOLUMINESCENCE IN STRAINED BERYLLIUM-DOPED SI0.92GE0.08 EPILAYERS AND SI0.92GE0.08 SI SUPERLATTICES AT AMBIENT AND ELEVATED HYDROSTATIC-PRESSURE/, Physical review. B, Condensed matter, 55(11), 1997, pp. 7130-7140
Authors:
FREILER MB
SHIH MC
KIM S
LEVY M
HERMAN IP
SCARMOZZINO R
OSGOOD RM
Citation: Mb. Freiler et al., PATTERN TRANSFER AND PHOTOLUMINESCENCE DAMAGE ASSESSMENT OF DEEP-SUBMICROMETER FEATURES ETCHED BY PHOTON-INDUCED CRYOETCHING, Applied physics A: Materials science & processing, 63(2), 1996, pp. 143-151
Citation: S. Kim et al., HYDROSTATIC-PRESSURE DEPENDENCE OF ISOELECTRONIC BOUND EXCITONS IN BERYLLIUM-DOPED SILICON, Physical review. B, Condensed matter, 53(8), 1996, pp. 4434-4442
Citation: R. Eryigit et Ip. Herman, LATTICE PROPERTIES OF STRAINED GAAS, SI, AND GE USING A MODIFIED BOND-CHARGE MODEL, Physical review. B, Condensed matter, 53(12), 1996, pp. 7775-7784
Citation: Ip. Herman, REAL-TIME OPTICAL THERMOMETRY DURING SEMICONDUCTOR PROCESSING (REPRINTED FROM OPTICAL-DIAGNOSTICS-FOR-THIN-FILM-PROCESSING, 1996), IEEE journal of selected topics in quantum electronics, 1(4), 1995, pp. 1047-1053
Citation: Cc. Cheng et al., COMPETITIVE HALOGENATION OF SILICON SURFACES IN HBR CL-2 PLASMAS STUDIED RAY PHOTOELECTRON-SPECTROSCOPY AND IN-SITU, REAL-TIME, PULSED LASER-INDUCED THERMAL-DESORPTION/, Journal of vacuum science & technology. A. Vacuum, surfaces, and films, 13(4), 1995, pp. 1970-1976
Citation: S. Kim et al., USE OF HYDROSTATIC-PRESSURE TO RESOLVE PHONON REPLICALIKE FEATURES INTHE PHOTOLUMINESCENCE SPECTRUM OF BERYLLIUM-DOPED SILICON, Physical review. B, Condensed matter, 52(23), 1995, pp. 16309-16312
Authors:
FREILER M
MCLANE GF
KIM S
LEVY M
SCARMOZZINO R
HERMAN IP
OSGOOD RM
Citation: M. Freiler et al., LUMINESCENCE PROPERTIES OF SUBMICRON FEATURES FABRICATED BY USING MAGNETRON REACTIVE ION ETCHING WITH DIFFERENT SAMPLE BIASES, Applied physics letters, 67(26), 1995, pp. 3883-3885
Citation: Cc. Cheng et al., IN-SITU PULSED LASER-INDUCED THERMAL-DESORPTION STUDIES OF THE SILICON CHLORIDE SURFACE-LAYER DURING SILICON ETCHING IN HIGH-DENSITY PLASMAS OF CL2 AND CL2 O2 MIXTURES/, Journal of vacuum science & technology. A. Vacuum, surfaces, and films, 12(5), 1994, pp. 2630-2640
Citation: Ip. Herman et al., LASER-INDUCED THERMAL-DESORPTION AS AN IN-SITU SURFACE PROBE DURING PLASMA PROCESSING, Physical review letters, 72(17), 1994, pp. 2801-2804
Citation: Zf. Sui et Ip. Herman, EFFECT OF STRAIN ON PHONONS IN SI, GE, AND SI GE HETEROSTRUCTURES/, Physical review. B, Condensed matter, 48(24), 1993, pp. 17938-17953
Citation: Ja. Tuchman et al., PHOTOLUMINESCENCE OF ZNSE ZNMNSE SUPERLATTICES UNDER HYDROSTATIC-PRESSURE, Journal of applied physics, 73(11), 1993, pp. 7730-7738