Authors:
PARK DG
TAO M
LI D
BOTCHKAREV AE
FAN Z
WANG Z
MOHAMMAD SN
ROCKETT A
ABELSON JR
MORKOC H
HEYD AR
ALTEROVITZ SA
Citation: Dg. Park et al., GATE QUALITY SI3N4 PREPARED BY LOW-TEMPERATURE REMOTE PLASMA-ENHANCEDCHEMICAL-VAPOR-DEPOSITION FOR III-V SEMICONDUCTOR-BASED METAL-INSULATOR-SEMICONDUCTOR DEVICES, Journal of vacuum science & technology. B, Microelectronics and nanometer structures processing, measurement and phenomena, 14(4), 1996, pp. 2674-2683
Authors:
LEE J
COLLINS RW
HEYD AR
FLACK F
SAMARTH N
Citation: J. Lee et al., SPECTROELLIPSOMETRY FOR CHARACTERIZATION OF ZN1-XCDXSE MULTILAYERED STRUCTURES ON GAAS, Applied physics letters, 69(15), 1996, pp. 2273-2275
Citation: Ra. Yarussi et al., MULTICHANNEL TRANSMISSION ELLIPSOMETER FOR CHARACTERIZATION OF ANISOTROPIC OPTICAL-MATERIALS, Journal of the Optical Society of America. A, Optics, image science,and vision., 11(8), 1994, pp. 2320-2330
Citation: I. An et al., SIMULTANEOUS REAL-TIME SPECTROSCOPIC ELLIPSOMETRY AND REFLECTANCE FORMONITORING THIN-FILM PREPARATION, Review of scientific instruments, 65(11), 1994, pp. 3489-3500