Authors: HIRANO R HIGASHIKI T NOMURA H KUWABARA O NISHIZAKA T UCHIDA N

Citation: R. Hirano et al., EVALUATION OF OVERLAY ACCURACY FOR THE X-RAY STEPPER TOXS-1, Journal of vacuum science & technology. B, Microelectronics and nanometer structures processing, measurement and phenomena, 12(6), 1994, pp. 3247-3250

Authors: HIGASHIKI T TOJO T TABATA M NISHIZAKA T YOSHINO H SAITO S

Citation: T. Higashiki et al., ESTIMATION AND IMPROVEMENT OF TTL ALIGNMENT ERROR BUDGETS FOR EXCIMER-LASER ALIGNER, International journal of the Japan Society for Precision Engineering, 28(3), 1994, pp. 267-272

Authors: UCHIDA N KUWABARA O TOJYO T HIGASHIKI T TAKAHASHI Y YOSHINO H

Citation: N. Uchida et al., AN EXCIMER-LASER STEPPER WITH THROUGH-THE-LENS ALIGNMENT, International journal of the Japan Society for Precision Engineering, 28(2), 1994, pp. 150-155

Authors: HIGASHIKI T TOJO T TABATA M NISHIZAKA T YOSHINO H SAITO S

Citation: T. Higashiki et al., TTL ALIGNMENT FOR EXCIMER-LASER ALIGNER - REAL-TIME SMART WITH CORRECTING LATERAL CHROMATIC ABERRATION, International journal of the Japan Society for Precision Engineering, 27(4), 1993, pp. 379-384