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Authors: CHANG S CHIA M CASTILLOBORELLEY P HIGDON W JIANG Q JOHNSON J OBEDIER L PUTTY M SHI Q SPARKS D ZARABADI S

Citation: S. Chang et al., AN ELECTROFORMED CMOS INTEGRATED ANGULAR RATE SENSOR, Sensors and actuators. A, Physical, 66(1-3), 1998, pp. 138-143