ANGULAR RATE SENSOR AND ACCELEROMETER COMBINED ON THE SAME MICROMACHINED CMOS CHIP

Authors
SPARKS DR HUANG X HIGDON W JOHNSON JD
Citation
Dr. Sparks et al., ANGULAR RATE SENSOR AND ACCELEROMETER COMBINED ON THE SAME MICROMACHINED CMOS CHIP, Microsystem technologies, 4(3), 1998, pp. 139-142
Citations number
8
Categorie Soggetti
Engineering, Eletrical & Electronic","Instument & Instrumentation
Journal title
Microsystem technologies → ACNP
ISSN journal
09467076
Volume
4
Issue
3
Year of publication
1998
Pages
139 - 142
Database
ISI
SICI code
0946-7076(1998)4:3<139:ARSAAC>2.0.ZU;2-#
Abstract
This paper describes an electroformed micromachining technology capabl e of producing both angular rate sensors and accelerometers. The senso rs fabricated are CMOS integrated for improved signal output. Automoti ve applications for these devices will also be discussed.