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Results: 1-25/89
Authors:
MICHEL B
SCHUBERT A
Citation: B. Michel et A. Schubert, MICROMAT - INTERNATIONAL-CONFERENCE ON MICRO MATERIALS, Microsystem technologies, 5(1), 1998, pp. 1-2
Authors:
BUCHHOLD R
NAKLADAL A
GERLACH G
SAHRE K
EICHHORN KJ
MULLER M
Citation: R. Buchhold et al., REDUCTION OF MECHANICAL-STRESS IN MICROMACHINED COMPONENTS CAUSED BY HUMIDITY-INDUCED VOLUME EXPANSION OF POLYMER LAYERS, Microsystem technologies, 5(1), 1998, pp. 3-12
Authors:
DEWOLF I
MAES HE
Citation: I. Dewolf et He. Maes, MECHANICAL-STRESS MEASUREMENTS USING MICRO-RAMAN SPECTROSCOPY, Microsystem technologies, 5(1), 1998, pp. 13-17
Authors:
KEHOE L
KELLY PV
CREAN GM
Citation: L. Kehoe et al., APPLICATION OF THE LASER FLASH DIFFUSIVITY METHOD TO THIN HIGH THERMAL-CONDUCTIVITY MATERIALS, Microsystem technologies, 5(1), 1998, pp. 18-21
Authors:
SCHILTGES G
GSELL D
DUAL J
Citation: G. Schiltges et al., TORSIONAL TESTS ON MICROSTRUCTURES - 2 METHODS TO DETERMINE SHEAR-MODULI, Microsystem technologies, 5(1), 1998, pp. 22-29
Authors:
KOMAI K
MINOSHIMA K
INOUE S
Citation: K. Komai et al., FRACTURE AND FATIGUE BEHAVIOR OF SINGLE-CRYSTAL SILICON MICROELEMENTSAND NANOSCOPIC AFM DAMAGE EVALUATION, Microsystem technologies, 5(1), 1998, pp. 30-37
Authors:
GLUCHE P
LEUNER R
VESCAN A
EBERT W
KOHN E
REMBE C
DERWIESCHE S
HOFER EP
Citation: P. Gluche et al., ACTUATOR SENSOR TECHNOLOGY ON ELECTRONIC GRADE DIAMOND FILMS, Microsystem technologies, 5(1), 1998, pp. 38-43
Authors:
RUPRECHT R
HANEMANN T
PIOTTER V
HAUSSELT J
Citation: R. Ruprecht et al., POLYMER MATERIALS FOR MICROSYSTEM TECHNOLOGIES, Microsystem technologies, 5(1), 1998, pp. 44-48
Authors:
QUANDT E
HOLLECK H
Citation: E. Quandt et H. Holleck, TRANSDUCER AND PROTECTIVE PVD-FILMS FOR APPLICATIONS IN MICROSYSTEM COMPONENTS, Microsystem technologies, 5(1), 1998, pp. 49-58
Authors:
CHAUDHURI B
GUCKEL H
KLEIN J
FISCHER K
Citation: B. Chaudhuri et al., PHOTORESIST APPLICATION FOR THE LIGA PROCESS, Microsystem technologies, 4(4), 1998, pp. 159-162
Authors:
DENG K
DEWA AS
RITTER DC
BONHAM C
GUCKEL H
Citation: K. Deng et al., CHARACTERIZATION OF GEAR PUMPS FABRICATED BY LIGA, Microsystem technologies, 4(4), 1998, pp. 163-167
Authors:
FAN L
LAST H
WOOD R
DUDLEY B
MALEK CK
LING Z
Citation: L. Fan et al., SLIGA BASED UNDERWATER WEAPON SAFETY AND ARMING SYSTEM, Microsystem technologies, 4(4), 1998, pp. 168-171
Authors:
KLEIN J
GUCKEL H
Citation: J. Klein et H. Guckel, HIGH WINDING DENSITY MICRO COILS FOR MAGNETIC ACTUATORS, Microsystem technologies, 4(4), 1998, pp. 172-175
Authors:
FISCHER K
KLEIN J
CHAUDHURI B
GUCKEL H
Citation: K. Fischer et al., DESIGN AND FABRICATION OF ONE MILLIMETER HIGH STRUCTURES, Microsystem technologies, 4(4), 1998, pp. 176-179
Authors:
FISCHER K
GUCKEL H
Citation: K. Fischer et H. Guckel, LONG THROW LINEAR MAGNETIC ACTUATORS STACKABLE TO ONE MILLIMETER OF STRUCTURAL HEIGHT, Microsystem technologies, 4(4), 1998, pp. 180-183
Authors:
GERNER M
HOLLDACK K
LUTTGE R
SCHMIDT M
Citation: M. Gerner et al., MANUFACTURING PINHOLE ARRAYS FOR X-RAY SOURCE DIAGNOSTICS USING LIGA, Microsystem technologies, 4(4), 1998, pp. 184-186
Authors:
TANG CM
STIER E
FISCHER K
GUCKEL H
Citation: Cm. Tang et al., ANTI-SCATTERING X-RAY GRID, Microsystem technologies, 4(4), 1998, pp. 187-192
Authors:
SONG JJ
BAJIKAR S
DECARLO F
KANG YW
KUSTOM RL
MANCINI DC
NASSIRI A
LAI B
FEINERMAN AD
WHITE V
Citation: Jj. Song et al., LIGA-FABRICATED COMPACT MM-WAVE LINEAR-ACCELERATOR CAVITIES, Microsystem technologies, 4(4), 1998, pp. 193-196
Authors:
PYE N
MCCORMICK M
CHOWANEITZ EG
HARPER M
GOODWIN M
Citation: N. Pye et al., MICRO FLUIDIC CONTROL-SYSTEMS IN DEEP-ETCH OPTICAL LITHOGRAPHY, Microsystem technologies, 4(4), 1998, pp. 197-200
Authors:
TSUEI TW
WOOD RL
MALEK CK
DONNELLY MM
FAIR RB
Citation: Tw. Tsuei et al., TAPERED MICROVALVES FABRICATED BY OFF-AXIS X-RAY-EXPOSURES, Microsystem technologies, 4(4), 1998, pp. 201-204
Authors:
BLEY P
Citation: P. Bley, INTERNATIONAL-CONFERENCE ON HIGH-ASPECT-RATIO MICROSTRUCTURE TECHNOLOGY HARMST-97, Microsystem technologies, 4(3), 1998, pp. 103-103
Authors:
HENRY AC
MCCARLEY RL
DAS S
MALEK CK
POCHE DS
Citation: Ac. Henry et al., STRUCTURAL-CHANGES IN PMMA UNDER HARD X-RAY-IRRADIATION, Microsystem technologies, 4(3), 1998, pp. 104-109
Authors:
THIES A
PIOTTER V
HAUSSELT JH
HAGENA OF
Citation: A. Thies et al., A NEW METHOD FOR MASS FABRICATION OF METALLIC MICROSTRUCTURES, Microsystem technologies, 4(3), 1998, pp. 110-112
Authors:
LIN L
CHENG YT
CHIU CJ
Citation: L. Lin et al., COMPARATIVE-STUDY OF HOT EMBOSSED MICRO STRUCTURES FABRICATED BY LABORATORY AND COMMERCIAL ENVIRONMENTS, Microsystem technologies, 4(3), 1998, pp. 113-116
Authors:
BACHER W
BADE K
MATTHIS B
SAUMER M
SCHWARZ R
Citation: W. Bacher et al., FABRICATION OF LIGA MOLD INSERTS, Microsystem technologies, 4(3), 1998, pp. 117-119