L. Kehoe et al., APPLICATION OF THE LASER FLASH DIFFUSIVITY METHOD TO THIN HIGH THERMAL-CONDUCTIVITY MATERIALS, Microsystem technologies, 5(1), 1998, pp. 18-21
The evolution of semiconductor devices and the dramatic increases in t
he power dissipation per unit volume of ever smaller microelectronic d
evices means electronic packaging technologies must evolve to manage t
he dissipation of heat. One of the major issues is the development of
new packaging materials optimised for heat management. Future packagin
g will incorporate layers with thermal diffusivities exceeding that of
copper in thin, sub-millimetre foils. Metrology techniques are needed
to measure the thermal diffusivity of these thin, thermally fast mate
rials. As some new materials are developed only in the form of thin su
bstrates the laser flash technique is limited in its application to th
ese materials. This paper addresses the application of a nanosecond pu
lsed laser flash instrument to the measurement of thermal diffusivity
of thin high thermal conductivity materials and the errors associated
with the measurement. An experimental comparison is made with a laser
flash instrument where the laser pulse is of higher energy but millise
cond pulse duration.