FABRICATION OF LIGA MOLD INSERTS

The present paper describes the fabrication sequence of a LIGA mold in sert by electroforming after the patterning steps of the overall proce ss. These tools are applied for large scale fabrication of microcompon ents made by molding and embossing processes. The application of an in termediate layer system leads to optimized process performance and to a better surface quality of the mold insert. The plating processes are described and the materials properties, e.g. hardness, are used for t he characterization of the recrystallization behavior of the electrofo rmed nickel which yields the high temperature application limit of the tool.