POLYMER MATERIALS FOR MICROSYSTEM TECHNOLOGIES

Authors
RUPRECHT R HANEMANN T PIOTTER V HAUSSELT J
Citation
R. Ruprecht et al., POLYMER MATERIALS FOR MICROSYSTEM TECHNOLOGIES, Microsystem technologies, 5(1), 1998, pp. 44-48
Citations number
39
Categorie Soggetti
Engineering, Eletrical & Electronic","Instument & Instrumentation
Journal title
Microsystem technologies → ACNP
ISSN journal
09467076
Volume
5
Issue
1
Year of publication
1998
Pages
44 - 48
Database
ISI
SICI code
0946-7076(1998)5:1<44:PMFMT>2.0.ZU;2-J