MANUFACTURING PINHOLE ARRAYS FOR X-RAY SOURCE DIAGNOSTICS USING LIGA

The manufacturing of pinhole arrays with diameters 10 mu m up to 60 mu m in 100-300 mu m gold foils is described using LIGA. These structure s are used to characterize the electron beam in a storage ring by mean s of the emitted synchrotron radiation. The source inside the bending magnet 13 at BESSY I (single bunch mode, 70 mA ring current, pinholes diameter 60 mu m) is (448 +/- 40) mu m in height and (768 +/- 40)mu m in horizontal width. For BESSY II pinholes with diameter 10-20 mu m wi ll be used utilizing bending magnet radiation (resolution similar to 1 0 mu m), single pinholes with 1-5 mu m in diameter are dedicated to in sertion device characterization (coherence).