DESIGN AND FABRICATION OF ONE MILLIMETER HIGH STRUCTURES

Authors
FISCHER K KLEIN J CHAUDHURI B GUCKEL H
Citation
K. Fischer et al., DESIGN AND FABRICATION OF ONE MILLIMETER HIGH STRUCTURES, Microsystem technologies, 4(4), 1998, pp. 176-179
Citations number
5
Categorie Soggetti
Engineering, Eletrical & Electronic","Instument & Instrumentation
Journal title
Microsystem technologies → ACNP
ISSN journal
09467076
Volume
4
Issue
4
Year of publication
1998
Pages
176 - 179
Database
ISI
SICI code
0946-7076(1998)4:4<176:DAFOOM>2.0.ZU;2-1
Abstract
To obtain greater output from micromachines and greater sensitivity fr om microsensors' structure heights must increase into the millimeter r ange. Two methods exist to obtain this structure height: the single la yer technique and the multi-layer stacking technique. These methods ar e examined and the advantages and limitations of both are determined.