Authors: ZUNIGA M WALLRAFF G TOMACRUZ E SMITH B LARSON C HINSBURG WD NEUREUTHER AR

Citation: M. Zuniga et al., SIMULATION OF LOCALLY ENHANCED 3-DIMENSIONAL DIFFUSION IN CHEMICALLY AMPLIFIED RESISTS, Journal of vacuum science & technology. B, Microelectronics and nanometer structures processing, measurement and phenomena, 11(6), 1993, pp. 2862-2866