Authors: HEIM D HOCHREITER R

Citation: D. Heim et R. Hochreiter, TIALN AND TIALCN DEPOSITION IN AN INDUSTRIAL PACVD-PLANT, Surface & coatings technology, 98(1-3), 1998, pp. 1553-1556

Authors: HOCHREITER R LAIMER J STORI H HEIM D

Citation: R. Hochreiter et al., OPTICAL-EMISSION SPECTROSCOPY ON AN INDUSTRIAL PACVD SYSTEM FOR TITANIUM NITRIDE, Surface & coatings technology, 74-5(1-3), 1995, pp. 443-449