Authors:
IZUNOME K
SHIRAI H
KASHIMA K
YOSHIKAWA J
HOJO A
Citation: K. Izunome et al., THE EFFECT OF HYDROGEN ANNEALING ON OXYGEN PRECIPITATION BEHAVIOR ANDGATE OXIDE INTEGRITY IN CZOCHRALSKI SI WAFERS, Journal of the Electrochemical Society, 144(10), 1997, pp. 3695-3695
Authors:
ZHONG L
HOJO A
MATSUSHITA Y
AIBA Y
HAYASHI K
TAKEDA R
SHIRAI H
SAITO H
MATSUSHITA J
YOSHIKAWA J
Citation: L. Zhong et al., A NOVEL CONFIGURATION OF ATOMIC STEPS OBSERVED ON VICINAL SILICON(100) SURFACE ANNEALED IN A HYDROGEN ATMOSPHERE, Philosophical magazine. A. Physics of condensed matter. Structure, defects and mechanical properties, 73(5), 1996, pp. 1249-1260
Authors:
ZHONG L
HOJO A
MATSUSHITA Y
AIBA Y
HAYASHI K
TAKEDA R
SHIRAI H
SAITO H
MATSUSHITA J
YOSHIKAWA J
Citation: L. Zhong et al., EVIDENCE OF SPONTANEOUS FORMATION OF STEPS ON SILICON(100), Physical review. B, Condensed matter, 54(4), 1996, pp. 2304-2307
Authors:
ZHONG L
HOJO A
AIBA Y
CHAKI K
YOSHIKAWA J
HAYASHI K
Citation: L. Zhong et al., ATOMIC STEPS ON A SILICON(001) SURFACE TILTED TOWARD AN ARBITRARY DIRECTION, Applied physics letters, 68(13), 1996, pp. 1823-1825
Authors:
IZUNOME K
SHIRAI H
KASHIMA K
YOSHIKAWA J
HOJO A
Citation: K. Izunome et al., OXYGEN PRECIPITATION IN CZOCHRALSKI-GROWN SILICON-WAFERS DURING HYDROGEN ANNEALING, Applied physics letters, 68(1), 1996, pp. 49-50