Authors: BREESE MBH SAINT A SEXTON FW HOM KM SCHONE H DOYLE BL LAIRD JS LEGGE GJF

Citation: Mbh. Breese et al., OPTIMIZATION OF ION-BEAM-INDUCED CHARGE MICROSCOPY FOR THE ANALYSIS OF INTEGRATED-CIRCUITS, Journal of applied physics, 77(8), 1995, pp. 3734-3741