Authors:
SHANK SM
CHEN FT
SKVARLA M
CRAIGHEAD HG
COOK P
BUSSJAGER R
HAAS F
HONEY DA
Citation: Sm. Shank et al., MULTIPLE-LEVEL PHASE GRATINGS FABRICATED USING FOCUSED ION-BEAM MILLING AND ELECTRON-BEAM LITHOGRAPHY, Journal of vacuum science & technology. B, Microelectronics and nanometer structures processing, measurement and phenomena, 12(6), 1994, pp. 3643-3647
Authors:
MIKOLAS D
BOJKO R
CRAIGHEAD HG
HAAS F
HONEY DA
BARE HF
Citation: D. Mikolas et al., FABRICATION OF ASPHERIC HIGH NUMERICAL APERTURE REFLECTIVE DIFFRACTIVE OPTIC ELEMENTS USING ELECTRON-BEAM LITHOGRAPHY, Journal of vacuum science & technology. B, Microelectronics and nanometer structures processing, measurement and phenomena, 12(1), 1994, pp. 20-25