Authors: SHANK SM CHEN FT SKVARLA M CRAIGHEAD HG COOK P BUSSJAGER R HAAS F HONEY DA

Citation: Sm. Shank et al., MULTIPLE-LEVEL PHASE GRATINGS FABRICATED USING FOCUSED ION-BEAM MILLING AND ELECTRON-BEAM LITHOGRAPHY, Journal of vacuum science & technology. B, Microelectronics and nanometer structures processing, measurement and phenomena, 12(6), 1994, pp. 3643-3647

Authors: MIKOLAS D BOJKO R CRAIGHEAD HG HAAS F HONEY DA BARE HF

Citation: D. Mikolas et al., FABRICATION OF ASPHERIC HIGH NUMERICAL APERTURE REFLECTIVE DIFFRACTIVE OPTIC ELEMENTS USING ELECTRON-BEAM LITHOGRAPHY, Journal of vacuum science & technology. B, Microelectronics and nanometer structures processing, measurement and phenomena, 12(1), 1994, pp. 20-25