Authors:
BARTRAM ME
HOWARD AJ
BACA AG
SHUL RJ
RIEGER DJ
Citation: Me. Bartram et al., A NEW METHOD FOR PROMOTING PHOTORESIST ADHESION ON TUNGSTEN FILMS FORSELF-ALIGNED REFRACTORY GATES ON GAAS, Journal of the Electrochemical Society, 140(10), 1993, pp. 2998-3001