Authors:
HRYNIEWICZ JV
CHEN YJ
HSU SH
LEE CHD
PORKOLAB GA
Citation: Jv. Hryniewicz et al., ULTRAHIGH-VACUUM CHEMICALLY ASSISTED ION-BEAM ETCHING SYSTEM WITH A 3-GRID ION-SOURCE, Journal of vacuum science & technology. A. Vacuum, surfaces, and films, 15(3), 1997, pp. 616-621
Authors:
HSU SH
JOHNSON FG
TABATABAEI SA
AGARWALA S
HRYNIEWICZ JV
TOWNER FJ
CHEN YJ
STONE DR
Citation: Sh. Hsu et al., INGAAS INP PIN PHOTODIODE ARRAYS ON ALGAAS/GAAS WAVE-GUIDE FILMS BY SOLID SOURCE MOLECULAR-BEAM EPITAXY/, Electronics Letters, 33(13), 1997, pp. 1171-1173
Authors:
PORKOLAB GA
HSU SH
HRYNIEWICZ JV
LIN WH
CHEN YJ
AGARWALA S
JOHNSON FG
KING O
DAGENAIS M
STONE DR
Citation: Ga. Porkolab et al., ETCH-MASK OF PYROLYTIC-PHOTORESIST THIN-FILM FOR SELF-ALIGNED FABRICATION OF SMOOTH AND DEEP FACETED 3-DIMENSIONAL MICROSTRUCTURES, Journal of vacuum science & technology. B, Microelectronics and nanometer structures processing, measurement and phenomena, 14(6), 1996, pp. 3650-3653