Authors:
KANE WF
COHEN SA
HUMMEL JP
LUTHER B
BEACH DB
Citation: Wf. Kane et al., USE OF SIBN AND SIBON FILMS PREPARED BY PLASMA-ENHANCED CHEMICAL-VAPOR-DEPOSITION FROM BORAZINE AS INTERCONNECTION DIELECTRICS, Journal of the Electrochemical Society, 144(2), 1997, pp. 658-663