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Results: 1-3 |
Results: 3
LINEWIDTH AND UNDERLAYER INFLUENCE ON TEXTURE IN SUBMICROMETER-WIDE AL AND ALCU LINES
Authors: HURD JL RODBELL KP GIGNAC LM CLEVENGER LA IGGULDEN RC SCHNABEL RF WEBER SJ SCHMIDT NH
Citation: Jl. Hurd et al., LINEWIDTH AND UNDERLAYER INFLUENCE ON TEXTURE IN SUBMICROMETER-WIDE AL AND ALCU LINES, Applied physics letters, 72(3), 1998, pp. 326-328
FABRICATION OF SUBMICRON SINGLE-CRYSTALLINE AND BAMBOO AL LINES BY RECRYSTALLIZATION
Authors: VANDENHOMBERG MJC ALKEMADE PFA VERBRUGGEN AH DIRKS AG HURD JL RADELAAR S
Citation: Mjc. Vandenhomberg et al., FABRICATION OF SUBMICRON SINGLE-CRYSTALLINE AND BAMBOO AL LINES BY RECRYSTALLIZATION, Microelectronic engineering, 35(1-4), 1997, pp. 277-280
CURVED CRYSTAL-LATTICE IN RESOLIDIFIED SUBMICRON AL LINES
Authors: VANDENHOMBERG MJC ALKEMADE PFA RADELAAR S HURD JL DIRKS AG
Citation: Mjc. Vandenhomberg et al., CURVED CRYSTAL-LATTICE IN RESOLIDIFIED SUBMICRON AL LINES, Applied physics letters, 70(3), 1997, pp. 318-320
Risultati: 1-3 |