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Results: 26-27/27
Authors:
HUTCHINSON JM
PARTLO WN
HSU R
OLDHAM WG
Citation: Jm. Hutchinson et al., 213NM LITHOGRAPHY, Microelectronic engineering, 21(1-4), 1993, pp. 15-18
Authors:
HUTCHINSON JM
DAS S
QIAN QD
GAW HT
Citation: Jm. Hutchinson et al., MODELING SPRAY PUDDLE DISSOLUTION PROCESSES FOR DEEP-ULTRAVIOLET ACID-HARDENED RESISTS, Optical engineering, 32(10), 1993, pp. 2395-2402