Authors:
Watanabe, T
Kinoshita, H
Nii, H
Hamamoto, K
Tsubakino, H
Hada, H
Komano, H
Irie, S
Citation: T. Watanabe et al., Photoinduced outgassing from the resist for extreme ultraviolet lithography by the analysis of mass spectroscopy, J VAC SCI B, 19(3), 2001, pp. 736-742
Authors:
Amanuma, K
Kobayashi, S
Tatsumi, T
Maejima, Y
Hada, H
Yamada, J
Miwa, T
Koike, H
Toyoshima, H
Kunio, T
Citation: K. Amanuma et al., Characteristics of 0.25 mu m ferroelectric nonvolatile memory with a Pb(Zr, Ti)O-3 capacitor on a metal/via-stacked plug, JPN J A P 1, 39(4B), 2000, pp. 2098-2101
Authors:
Seike, A
Amanuma, K
Kobayashi, S
Tatsumi, T
Koike, H
Hada, H
Citation: A. Seike et al., Polarization reversal kinetics of a lead zirconate titanate thin-film capacitor for nonvolatile memory, J APPL PHYS, 88(6), 2000, pp. 3445-3447