Authors: Hill, SB Haich, CA Dunning, FB Walters, GK McClelland, JJ Celotta, RJ Craighead, HG Han, J Tanenbaum, DM

Citation: Sb. Hill et al., Patterning of octadecylsiloxane self-assembled monolayers on Si(100) usingAr(P-3(0,2)) atoms, J VAC SCI B, 17(3), 1999, pp. 1087-1089

Authors: Hill, SB Haich, CA Dunning, FB Walters, GK McClelland, JJ Celotta, RJ Craighead, HG

Citation: Sb. Hill et al., Patterning of hydrogen-passivated Si(100) using Ar(P-3(0,2)) metastable atoms, APPL PHYS L, 74(15), 1999, pp. 2239-2241