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Citation: S. Libertino et al., Formation, evolution and annihilation of interstitial clusters in ion implanted Si, NUCL INST B, 148(1-4), 1999, pp. 247-251

Authors: Benton, JL Halliburton, K Libertino, S Eaglesham, DJ Coffa, S

Citation: Jl. Benton et al., Electrical signatures and thermal stability of interstitial clusters in ion implanted Si, J APPL PHYS, 84(9), 1998, pp. 4749-4756