Authors: Juang, MH Harn, SC

Citation: Mh. Juang et Sc. Harn, Formation of shallow p(+)n junctions using different annealing schemes with low thermal budget, JPN J A P 1, 39(3A), 2000, pp. 1066-1069

Authors: Juang, MH Harn, SC

Citation: Mh. Juang et Sc. Harn, Shallow p(+)n junctions formed by using a two-step annealing scheme with low thermal budget, IEEE ELEC D, 20(12), 1999, pp. 618-620