Authors:
Zetterling, CM
Ostling, M
Harris, CI
Wood, PC
Wong, SS
Citation: Cm. Zetterling et al., UV-ozone precleaning and forming gas annealing applied to wet thermal oxidation of p-type silicon carbide, MAT SC S PR, 2(1), 1999, pp. 23-27
Authors:
Valcheva, E
Paskova, T
Ivanov, IG
Yakimova, R
Wahab, Q
Savage, S
Nordell, N
Harris, CI
Citation: E. Valcheva et al., B implantation in 6H-SiC: Lattice damage recovery and implant activation upon high-temperature annealing, J VAC SCI B, 17(3), 1999, pp. 1040-1044