Authors: Hatzopoulos, N Skorupa, W Siapkas, DI

Citation: N. Hatzopoulos et al., Double SIMOX structures formed by sequential high energy oxygen implantation into silicon, J ELCHEM SO, 147(1), 2000, pp. 354-362

Authors: Uchikoga, S Lai, DF Robertson, J Milne, WI Hatzopoulos, N Yankov, RA Weiler, M

Citation: S. Uchikoga et al., Low-temperature anodic oxidation of silicon using a wave resonance plasma source, APPL PHYS L, 75(5), 1999, pp. 725-727