Authors:
Wilden, J
Wank, A
Asmann, M
Heberlein, JVR
Boulos, MI
Gitzhofer, F
Citation: J. Wilden et al., Synthesis of Si-C-N coatings by thermal Plasmajet chemical vapour deposition applying liquid precursors, APPL ORGAN, 15(10), 2001, pp. 841-857
Citation: Ob. Postel et Jvr. Heberlein, Boron carbide thin film deposition using supersonic plasma jet with substrate biasing, DIAM RELAT, 8(10), 1999, pp. 1878-1884