Authors: Heister, U Krempel-Hesse, J Szczyrbowski, J Teschner, G Bruch, J Brauer, G

Citation: U. Heister et al., TwinMag II: Improving an advanced sputtering tool, VACUUM, 59(2-3), 2000, pp. 424-430

Authors: Heister, U Krempel-Hesse, J Szczyrbowski, J Teschner, G Bruch, J Brauer, G

Citation: U. Heister et al., TwinMag (TM) II: attempts to improve an excellent sputter tool, THIN SOL FI, 351(1-2), 1999, pp. 27-31