Authors: Palun, L Tedesco, S Heitzman, M Martin, F Fraboulet, D Dal'zotto, B Nier, ME Mur, P Charvolin, T Mariolle, D Tardif, F

Citation: L. Palun et al., Fabrication of single electron devices by hybrid (E-beam/DUV) lithography, MICROEL ENG, 53(1-4), 2000, pp. 167-170