Authors: Stein, DJ Cecchi, JL Hetherington, DL

Citation: Dj. Stein et al., Atomic force microscopy, lateral force microscopy, and transmission electron microscopy investigations and adhesion force measurements for elucidation of tungsten removal mechanisms, J MATER RES, 14(9), 1999, pp. 3695-3706

Authors: Stein, DJ Hetherington, DL Cecchi, JL

Citation: Dj. Stein et al., Investigation of the kinetics of tungsten chemical mechanical polishing inpotassium iodate-based slurries II. Roles of colloid species and slurry chemistry, J ELCHEM SO, 146(5), 1999, pp. 1934-1938

Authors: Stein, DJ Hetherington, DL Cecchi, JL

Citation: Dj. Stein et al., Investigation of the kinetics of tungsten chemical mechanical polishing inpotassium iodate-based slurries - I. Role of alumina and potassium iodate, J ELCHEM SO, 146(1), 1999, pp. 376-381

Authors: Nakakura, CY Hetherington, DL Shaneyfelt, MR Shea, PJ Erickson, AN

Citation: Cy. Nakakura et al., Observation of metal-oxide-semiconductor transistor operation using scanning capacitance microscopy, APPL PHYS L, 75(15), 1999, pp. 2319-2321