Authors:
Hibert, C
Aachboun, S
Boufnichel, M
Ranson, P
Citation: C. Hibert et al., Study of a mechanically clamped cryo-chuck device in a high density plasmafor deep anisotropic etching of silicon, J VAC SCI A, 19(2), 2001, pp. 646-650
Authors:
Motret, O
Hibert, C
Pellerin, S
Pouvesle, JM
Citation: O. Motret et al., Rotational temperature measurements in atmospheric pulsed dielectric barrier discharge - gas temperature and molecular fraction effects, J PHYS D, 33(12), 2000, pp. 1493-1498
Authors:
Hibert, C
Pave, D
Motret, O
Gaurand, I
Nikravech, M
Viladrosa, R
Pouvesle, JM
Citation: C. Hibert et al., Effects of synchronized triggering and pulsation of a V-UV source and a dielectric barrier discharge on the production of oxidant species, J PHYS IV, 9(P5), 1999, pp. 85-86
Authors:
Hibert, C
Motret, O
Gaurand, I
Viladrosa, R
Pouvesle, JM
Citation: C. Hibert et al., Density of the radical OH(X) measured by absorption of self-tuning external ultraviolet radiation, J PHYS IV, 9(P5), 1999, pp. 121-122
Authors:
Hibert, C
Gaurand, I
Motret, O
Pouvesle, JM
Citation: C. Hibert et al., [OH(X)] measurements by resonant absorption spectroscopy in a pulsed dielectric barrier discharge, J APPL PHYS, 85(10), 1999, pp. 7070-7075