Authors:
Gonda, S
Doi, T
Kurosawa, T
Tanimura, Y
Hisata, N
Yamagishi, T
Fujimoto, H
Yukawa, H
Citation: S. Gonda et al., Real-time, interferometrically measuring atomic force microscope for direct calibration of standards, REV SCI INS, 70(8), 1999, pp. 3362-3368