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Results:
1-1
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Results: 1
SiO2 surface and SiO2/Si interface topography change by thermal oxidation
Authors:
Tokuda, N Murata, M Hojo, D Yamabe, K
Citation:
N. Tokuda et al., SiO2 surface and SiO2/Si interface topography change by thermal oxidation, JPN J A P 1, 40(8), 2001, pp. 4763-4768
Risultati:
1-1
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