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Results: 2
Alkaline cleaning of silicon wafers: additives for the prevention of metalcontamination
Authors:
Martin, AR Baeyens, M Hub, W Mertens, PW Kolbesen, BO
Citation:
Ar. Martin et al., Alkaline cleaning of silicon wafers: additives for the prevention of metalcontamination, MICROEL ENG, 45(2-3), 1999, pp. 197-208
X-ray scattering from silicon surfaces: a useful tool for quality control
Authors:
Stommer, R Martin, AR Hub, W Gobel, H Pietsch, U
Citation:
R. Stommer et al., X-ray scattering from silicon surfaces: a useful tool for quality control, MICROEL ENG, 45(2-3), 1999, pp. 257-263
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