Citation: E. Hurtos et J. Rodriguez-viejo, Residual stress and texture in poly-SiC films grown by low-pressure organometallic chemical-vapor deposition, J APPL PHYS, 87(4), 2000, pp. 1748-1758
Authors:
Hurtos, E
Rodriguez-Viejo, J
Bassas, J
Clavaguera-Mora, MT
Zekentes, K
Citation: E. Hurtos et al., Low temperature SiC growth by metalorganic LPCVD on MBE carbonized Si (001) substrates, MAT SCI E B, 61-2, 1999, pp. 549-552