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PERFORMANCE OF HARD DLC PROTECTIVE FILM PREPARED BY PECVD METHOD FOR THIN-FILM MAGNETIC DISK
Authors:
IECHIKA K KOKAKU Y OOTAKE M ABE K TANI H INABA H
Citation:
K. Iechika et al., PERFORMANCE OF HARD DLC PROTECTIVE FILM PREPARED BY PECVD METHOD FOR THIN-FILM MAGNETIC DISK, IEEE transactions on magnetics, 30(6), 1994, pp. 4134-4136
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