Authors: PICKERING C RUSSELL J NAYAR V IMSCHWEILER J WILLE H HARRINGTON S WIGGINS C STEHLE JL PIEL JP BRUCHEZ J

Citation: C. Pickering et al., EVALUATION OF AUTOMATED SPECTROSCOPIC ELLIPSOMETRY FOR IN-LINE PROCESS-CONTROL - ESPRIT SEMICONDUCTOR EQUIPMENT ASSESSMENT (SEA) PROJECT IMPROVE, Thin solid films, 313, 1998, pp. 446-453