Authors: Imamiya, K Sugiura, Y Nakamura, H Himeno, T Takeuchi, K Ikehashi, T Kanda, K Hosono, K Shirota, R Aritome, S Shimizu, K Hatakeyama, K Sakui, K

Citation: K. Imamiya et al., A 130-mm(2), 256-mbit NAND flash with shallow trench isolation technology, IEEE J SOLI, 34(11), 1999, pp. 1536-1543