Authors: Schwalke, U Gabric, Z Elbel, N Bothe, K Hadawi, D Janssen, I Schon, P Inioutis, A Klose, R Plagmann, J

Citation: U. Schwalke et al., Corner parisitics-free low-cost trench isolation (vol 20, pg 563, 1999), IEEE ELEC D, 21(4), 2000, pp. 187-187

Authors: Schwalke, U Gabric, Z Elbel, N Bothe, K Hadawi, D Janssen, I Schon, P Inioutis, A Klose, R Plagmann, J

Citation: U. Schwalke et al., Corner-parasitics-free low-cost trench isolation, IEEE ELEC D, 20(11), 1999, pp. 563-565