Authors: Tanner, DM Miller, WM Peterson, KA Dugger, MT Eaton, WP Irwin, LW Senft, DC Smith, NF Tangyunyong, P Miller, SL

Citation: Dm. Tanner et al., Frequency dependence of the lifetime of a surface micromachined microengine driving a load, MICROEL REL, 39(3), 1999, pp. 401-414