Authors: Ishiwari, S Kato, H Habuka, H

Citation: S. Ishiwari et al., Development of evaluation method for organic contamination on silicon wafer surfaces, J ELCHEM SO, 148(11), 2001, pp. G644-G648

Authors: Shimizu, H Ishiwari, S

Citation: H. Shimizu et S. Ishiwari, Pack-extraction method combined with inductively coupled plasma mass spectroscopy to monitor metal contaminants on surfaces of silicon wafers, SEMIC SCI T, 15(7), 2000, pp. 776-781