Authors: SMIRNOVA TP JAKOVKINA LV JASHKIN IL SYSOEVA NP AMOSOV JI

Citation: Tp. Smirnova et al., BORON-NITRIDE FILMS PREPARED BY REMOTE PLASMA-ENHANCED CHEMICAL-VAPOR-DEPOSITION FROM BORAZINE (B3N3H6), Thin solid films, 237(1-2), 1994, pp. 32-37